MNE3115 - Microelectromechanical Systems | ||||||||||
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| * The offering term is subject to change without prior notice | ||||||||||
Course Aims | ||||||||||
The aim of this course is to provide students with the understanding of the functioning and construction of micro-sensors and micro-actuators integrated into micro electro mechanical systems (MEMS). Students will learn about design and fabrication fundamentals for MEMS, including the on-chip implementations for sensors and actuators of micron-scale dimensions. Apart from learning details of microstructure fabrication with the aid of microtooling, mechanics of silicon and thin-film materials will also be covered as well as principles of thermal micromechanics, electrostatic force, piezoresistivity, and capacitance-based detection of motion. Application examples will focus on micro-sensors (primarily of pressure and acceleration). Characteristics of some of these devices will be determined in laboratory experiments. Students will have the opportunity to discover and innovate in these domains. | ||||||||||
Assessment (Indicative only, please check the detailed course information) | ||||||||||
Continuous Assessment: 50% | ||||||||||
Examination: 50% | ||||||||||
Examination Duration: 2 hours | ||||||||||
For a student to pass the course, at least 30% of the maximum mark for both coursework and examination should be obtained. | ||||||||||
Detailed Course Information | ||||||||||
| MNE3115.pdf | ||||||||||
